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One-dimensional Simulation of RF CH_4 Plasma in a Fluid Model
LV Shaobo, LIN Zeng, BA Dechun, WANG Qing
2011, 28(3):
329-340.
A one-dimensional fluid model for RF methane plasma is presented.Equations of particle balance with drift-diffusion approximation for fluxes,and electron energy balance are solved.Totally 20 species(neutrals,radicals,ions,and electrons) are included in the model,as well as 49 reactions(27 electron reactions,7 ion-neutral reactions,and 15 neutral-neutral reactions).It is found that high electron reaction-rate occurs at high electric-field region.Besides inlet gas CH4,neutral gases H2,C2H6,C3H8,C2H4,and C2H2 also show high densities in the plasma.The main radical in plasma is CH3,with a density of about 1019m-3.At low pressures(e.g.,18Pa) the most important ion is CH5+.At high pressures(e.g.,67Pa) C2H5+ becomes the dominant ion.Radical and ion fluxes towards electrode(except C2H5+) increase slightly with power.
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