计算物理 ›› 1995, Vol. 12 ›› Issue (4): 561-564.
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谭震宇1, 何延才2
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Tan Zhenyu1, He Yancai2
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摘要: 应用Monte Carlo方法,对不同能量低能电子作用下背散射电子在固体中的空间分布作了计算,电子的弹性散射用Mott截面描述、非弹性散射按文献[3]的方法由Streitwolf、Quinn及Gryrinski的公式计算,大量计算得出一些规律,为低能电子显微学研究提供一定依据。
关键词: Monte Carlo方法, 背散射电子, 空间分布
Abstract: The spatial distribution of backscattered electron in solids have been calculated by Monte Carlo method, based on Mott cross-section for elastic scattering as well as Streitwolf,Quirm and Gryzinski's cross-section for inelastic scattering. Some regularities have been acquired from a large amount of calculations, providing a certain basis for the quantitative research of low-energy electron microscopy.
Key words: Monte Carlo method, backscattered electron, spatial distribution
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O562.5
谭震宇, 何延才. Monte Carlo方法计算背散射电子在固体中的空间分布[J]. 计算物理, 1995, 12(4): 561-564.
Tan Zhenyu, He Yancai. SPATIAL DISTRIBUTION OF BACKSCATTERED ELECTRONS IN SOLIDS BY MONTE CARLO SIMULATION[J]. CHINESE JOURNAL OF COMPUTATIONAL PHYSICS, 1995, 12(4): 561-564.
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