CHINESE JOURNAL OF COMPUTATIONAL PHYSICS ›› 2002, Vol. 19 ›› Issue (4): 321-324.

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MOLECULAR DYNAMICS SIMULATION TO THE THERMAL CONDUCTIVITY OF COPPER THIN-FILM

YE Jie-cheng, TANG Zhen-an   

  1. Department of Electronic Engineering, Dalian University of Technology, Dalian 116023, China
  • Received:2000-08-07 Revised:2001-02-19 Online:2002-07-25 Published:2002-07-25

Abstract: Thermal conductivity of copper films is simulated using the molecular dynamics.Size and temperature dependent effects of the films with 100~400nm thickness at 100~600K temperature are summarized according to the simulation.

Key words: thin-film, thermal conductivity, molecular dynamics

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