Abstract: Using a Combination of Monte Carlo models of fast electron and species (N₂⁺,N⁺,N_f), the creation rates and the energy distributions of species (N⁺,N_f) at the cathode in nitrogen glow discharge under different discharge conditions are studied.It is shown that the total density of N⁺ and N_f depends on the creation rate of ions(N₂⁺,N⁺) and the thermalization of N_f, and species(N⁺,N_f) bombarding negative wall is mainly produced by N₂⁺-N_2s dissociation at higher voltages,but mainly produced by e^--N_2s dissociation at lower voltages.

Key words: nitrogen dc glow discharge, Monte Carlo simulation, fast nitrogen atomic species, N₂⁺-N₂ dissociation collision