Using Monte Carlo method, both emission and spatial distributions of the backscattered electrons (BSEs) of the solids Al,Cu,Ag,Au under the action of low energy electrons with energy E₀ ≤ 5keV keV have been simulated and calculated. Mott cross section and the modified Bethe equation are used to describe the elastic and inelastic scattering of electrons in solids, respectively. The energy distribution, surface spatial distribution, depth distributioin in solids and angle distribution of BSEs have been obtained. The dependence of angle distribution of BSEs on the energy distribution, surface spatial distribution and depth distribution of BSEs are also calculated, describing the distribution regularity and emission of BSEs systematically.

Using Monte Carlo method of low energy electron scattering in polybasic medium based on the mean cross section,the scattering process of the low energy electron in the range of E₀≤5 keV has been numerically simulated.A series of the results,such as the backscattering coefficients,the energy spectrum and angular distribution of backscattered electrons,the interaction range of both primary and backscattered electrons in medium,energy dissipation distribution,have been obtained and compared with those calculated by the method of determining scattering center.The calculated results by both methods are in excellent agreement widely,showing the effectiveness and reliability of the method based on mean cross section.Also,the calculated results on the angular distributions of backscattered electrons seem not to follow a cosine law for both the lower energies as well as the medium with larger mean atomic number.

On the basis of author's theories and calculation method^[1,2,3],we made a evaluation program of determining thicknesses of thin films on substrates.The software can be conveniently operated,and have already been extensively applied to the calculations for determining thicknesses of avariety of film materials.

Based on the physical model and the calculating method developed by the authors, the calculation software of the spatial distribution of density of x-ray photons in solid is made. The scattering of electron beam with energy in KeV in solid and the excitement of x-ray photons can be simulated by using this program. The quantitative results-of the distributionof density of x-ray photons and the spatial range including various proportion of the photons are also obtained. It is significant for quantitative research of electron microscopy.

Based on the physical model and the calculation method proposed in references[1,2] by anthors,a calculation program of XQMA of micre-particle specimens by using Monte Carlo simulation was made.A series of theoretical formulae for the electron scattering and the production, absorption and fluorescence of characteristic X-rays in particles were given.The datum documents are established in the program.The softwa-re has the ability of automatically treating data,and it can also be applied to the XQMA of block specimens and thin film specimens.

The method proposed in reference[3] has been developed to e-nable measurement of compositions and thicknesses of films in micro-domain at the same time by Monte Carlo simulation.