A Monte-Carlo method on low-energy electron (LEE) scatttering in multilyer and polybasic medium is proposed. The Mott cross-section applies for discribing the elastic scattering of LEE, and the idea of mean cross section is suggested to simulate LEE elastic scattering in polybasic medium; the modified Bethe formula in polybasic medium is used for calculating energy loss of LEE inelastic scattering. The energy dissipation distributions of LEE in PMMA have been obtained.

The spatial distribution of backscattered electron in solids have been calculated by Monte Carlo method, based on Mott cross-section for elastic scattering as well as Streitwolf,Quirm and Gryzinski's cross-section for inelastic scattering. Some regularities have been acquired from a large amount of calculations, providing a certain basis for the quantitative research of low-energy electron microscopy.

Elastic scattering of Low-energy electron in solids is discribed with Mott cross-section, and a simplified calculation method on shell electron excitation is proposed.Monte Catlo simulation of low-energy electron scattering in Al, Cu, An have been proposed, the calculated backscattered coefficients, transmission coefficients are in good agreement with experiment results. Therefore, the stopping Power for low-energy electron are determined and comPared with results by Love, Rao-Sahib Wittry and Joy's modified Bethe equation.

Based on the privious paper (1) and using the Mott cross-section by solving relativistic Dirac equation for elastic scattering, Monte Carlo simulation of low energy electron scattering in Al bulk target and film have been performed. The calculated backscattering coefficients, the energy distribution of backscattered electrons and electron transmission coefficients are in good agreement with experimental results. The spatial distribution of low-loss backscattered electrons is also calculated and exhibits a high resolution.

The percolation threshold and critical parameters are obtained for the site-percolation problem on the square lattice with next-nearest-neighbour interactions by using Monte Carlo position space renormalization group procedure.It is shown that the site percolaton problems on the square lattice with next-nearest-neighbour interactions belongs to the same universality class as that with nearest-neighbour interactions.

In this paper, a method for calculating elastic scattering cross section of low energy electron based on solving relativistic Dirac equation is given, the cross sections calculated by applying Thomas-Fermi-Dirac (TFD) potential and Hartree-Fock (HF)potential respectively are compared, the cross sections of elements C, Al, Cu, Ag, Au are calculated, the differences between Mott model. Pendry model and Rutherford formula are also compared and analysed.

Based on the work of Pendry, a Partial wave method of combining Hartree approximation with Hartree-Fock approximation is proposed for calculating elastic scattering cross-section of low energy electron. That method not only save computer CPU time, but extend Pendry's to a few keV-eneryg region. The elastic scattering cross-sections of element Be, C, Al, Cu are calculated and compared to Rutherford cross-section. The present method has been applied to investigation of low energy electron scattering in solids. A flow chart of calculating elastic scattering cross-section of low energy electron is given.

The theories and the calculation methods methods of electron scattering with keV and below keV energy by Monte Carlo simulation are discussed in this paper and the applications in the important fields i.e. electron microscopy and electron beam lithography are introduced.