An expression of thermal resistance matrix is given.Transient temperature characteristics of three-dimensional chip-muhiprocessors(3D-CMP) are studied.Effect of heat capacity,thermal resistance and power consumption on temperature is analyzed. It shows that steady temperature of 3D-CMP is limited effectively by reducing thermal resistance and power consumption.Heat capacity influences rise time of temperature.It does not affect steady temperature.

With through silicon via(TSV) area scale factor r,an analytical thermal model for top layer of three-dimensional integrated circuits(3D IC) taking TSV into account was proposed.It is shown that temperature is lower after considering TSVs under same working conditions;the greater the scale factor r,the lower the temperature is;For more layers and smaller r,temperature increases sharply with decrease of r;The best range of TSV area ratio factor r is 0.5% to 1% for an 8-layer 3D IC.